Chemically resistant encapsulation for MEMS release
نویسنده
چکیده
Serguei Stoukatch, Microsys, Université de Liège; Liege, Belgium Ester Tooten, ICTEAM, Université Catholique de Louvain; Louvain-La-Neuve, Belgium Fabrice Axisa, Microsys, Université de Liège; Liege, Belgium Bruno Heusdens, TAIPRO Engineering, Seraing, Belgium Laurent A. Francis, ICTEAM, Université Catholique de Louvain; Louvain-La-Neuve, Belgium Jacques Destiné, EMMI, Université de Liège; Liege, Belgium
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